Automatic Error Detection in Integrated Circuits Image Segmentation: A Data-driven Approach. (arXiv:2211.03927v1 [cs.CV])

Due to the complicated nanoscale structures of current integrated
circuits(IC) builds and low error tolerance of IC image segmentation tasks,
most existing automated IC image segmentation approaches require human experts
for visual inspection to ensure correctness, which is one of the major
bottlenecks in large-scale industrial applications. In this paper, we present
the first data-driven automatic error detection approach targeting two types of
IC segmentation errors: wire errors and via errors. On an IC image dataset
collected from real industry, …

arxiv data data-driven detection error image integrated circuits segmentation