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Autonomous sputter synthesis of thin film nitrides with composition controlled by Bayesian optimization of optical plasma emission. (arXiv:2305.11122v3 [physics.app-ph] UPDATED)
cs.LG updates on arXiv.org arxiv.org
Autonomous experimentation has emerged as an efficient approach to accelerate
the pace of materials discovery. Although instruments for autonomous synthesis
have become popular in molecular and polymer science, solution processing of
hybrid materials and nanoparticles, examples of autonomous tools for physical
vapor deposition are scarce yet important for the semiconductor industry. Here,
we report the design and implementation of an autonomous workflow for sputter
deposition of thin films with controlled composition, leveraging a highly
automated sputtering reactor custom-controlled by Python, …
app arxiv autonomous bayesian become discovery examples experimentation film hybrid materials optimization physics plasma popular processing science solution synthesis tools