Deep Learning based Defect classification and detection in SEM images: A Mask R-CNN approach. (arXiv:2211.02185v1 [cs.CV])

In this research work, we have demonstrated the application of Mask-RCNN
(Regional Convolutional Neural Network), a deep-learning algorithm for computer
vision and specifically object detection, to semiconductor defect inspection
domain. Stochastic defect detection and classification during semiconductor
manufacturing has grown to be a challenging task as we continuously shrink
circuit pattern dimensions (e.g., for pitches less than 32 nm). Defect
inspection and analysis by state-of-the-art optical and e-beam inspection tools
is generally driven by some rule-based techniques, which in turn …

arxiv classification cnn deep learning detection images r-cnn sem