Physics-based modeling to data-driven learning? The paradigm shift in optical metrology

Deep learning is currently prompting increasing research interests and leading to a paradigm shift from physics-based modeling to data-driven learning in the field of optical metrology. Scientists in China and Singapore published a review article entitled "Deep learning in optical metrology: a review" in Light: Science & Applications. They provide a comprehensive review of deep learning in various optical metrology tasks, revealing that problem-specific deep-learning methods, in most cases, considerably outperform their physical model-based predecessors.

data data-driven learning machine learning & ai modeling paradigm physics shift