WaferSegClassNet -- A Light-weight Network for Classification and Segmentation of Semiconductor Wafer Defects. (arXiv:2207.00960v1 [cs.CV])

As the integration density and design intricacy of semiconductor wafers
increase, the magnitude and complexity of defects in them are also on the rise.
Since the manual inspection of wafer defects is costly, an automated artificial
intelligence (AI) based computer-vision approach is highly desired. The
previous works on defect analysis have several limitations, such as low
accuracy and the need for separate models for classification and segmentation.
For analyzing mixed-type defects, some previous works require separately
training one model for …

arxiv classification cv defects light network segmentation semiconductor